Silicon Membranes

Membrane properties

• pore diameter adjustable from 700 nm to 20 µm
• (pore diameter)/(pore distance) ratio from 0,33 to 0,45
• standard deviation < 1%
• flow-through membrane with symmetric pores
• membranes with one-sided closed sack-like pores
• pore depth of symmetric pores from several µm up to 200 µm
• pore surface ratio adjustable from 39%
• hexagonal and cubic pore order
• chemically und thermally stable
• functionalizable surface