Macroporous silicon

Our macroporous silicon consists of n- or p-doped single-crystal silicon which is being etched using an photo-electrochemical process.  The arrangement of the pores and the interpore distance are defined by a prestructured photo mask. The material can be used directly as a flow-through-membrane or as a one-side-closed template for the formation of macrostructures. 

MakroPor

Our MakroPor membranes feature pores with an unique pore diameter (deviation lower 5%) which stays constant through the complete length of the pores. The pores are arranged evenly over the complete wafer size in an exact hexagonal or cubic regime due to the prestructuring step. By applying an additional anisotropic etching the round pores can be also widened to square-shaped pores.

 

For further information please use our request form.

Material Properties

  • Pore diameter adjustable from 1 µm up to 10 µm (or bigger)
  • Interpore distance and arrangement of the pores adjustable by means of prestructurings through a photo mask 
  • Standard deviation < 5%
  • Flow-through-membrane with symmetric pores
  • Porous silicon with one-side-closed pores 
  • Pore depth from a few µm up to 500 µm
  • Porosity adjustable starting from 20%
  • Thermal stable up to 1200ºC (depending on the environment)
  • Functionalization of the surface possible

Standard Products

Interpore distancePore diameterPore lengthPore arrangement
1,5 µm0,8 - 1 µm200 µmHexagonal
4,2 µm2 - 2,5 µm500 µmHexagonal
12 µm5 - 6 µm500 µmCubic

Data Sheet MakroPor

The data sheet PDF can be downloaded here.

PeakPor

The PeakPor membranes offer pores with an unique pore diameter (deviation lower 5%) which stays constant through the complete length of the pores. The peaks are etched on the backside of the membrane instead of regular pore walls. The gradient of the peaks can be adjusted to the customers' needs. The pore sizes and interpore distances are equal to the data of the MacroPor products.

 

For further information please use our request form.

MesoPor

The MesoPor material offers an unordered branched porous structure which can be etched into the silicon material in different depths.

The pores can grow perpendicular to the surface, as well as laterally, which results in a branched structure.

The porosity and the surface roughness can be adjusted to the customers' needs.

 

For further information please use our request form.

Data sheet

The data sheet PDF can be downloaded here.